Abstract:
Micro Electro Mechanical Systems (MEMS) based
multi axis accelerometers are embedded in many modern
technological applications. These sensors are widely used in smart
electronics, bio-medical uses, automobiles and aeronautics. The
work followed herewith is focused on designing of a 2 degree of
freedom (D.O.F) MEMS based capacitive accelerometer which
can be used with such vibration detection modules. The 2mm x
2mm x 100μm sensor has a working range of up to ±16g and a
failure limit of 20g The movement of a proof mass which is 74.5%
of the sensor area is used to generate amplified voltage signals
based on the theory of capacitance using a series of capacitive
comb elements mounted on the perimeter of the sensor. Process
simplification is achieved with the use of a single Silicon-on-
Insulation (SOI) wafer and minimum masking material. The
paper contains details on structural and motion analysis
performed on the design and also contains techniques which can
be used for the fabrication of the sensor and electrical contacts
needed for the successful implementation of the sensor into
electrical circuitry.
