Priyadarshana, TGP; Wijethunge, HMDP; Jayasekara, BCCP; Amarasinghe, YWR
[Conference-Full-text]
This paper is focused on designing and optimization of a Micro Electro Mechanical System (MEMS)
based piezoresistive .t ype pressure 10 enhance the sensitivity by optimally utilizing the maximum
available Silicon wafer ...