Abstract:
This paper presents the design and simulation of
MEMS based piezoresistive pressure sensor for microfluidic
applications. Geometrical parameters are very much
considerable when designing microstructure of the pressure
sensor. Hence, an analysis is carried out by changing the
dimensional parameters of three different diaphragm
geometries namely square shaped diaphragm, circular shaped
diaphragm and cross sectional beam shaped diaphragm
respectively. This is performed in three dimensional mesh plots
using Matlab. The Finite Element Method (FEM) analyses are
performed in COMSOL and by comparing the results, the
square type diaphragm is chosen as best diaphragm geometry
for the microfluidic applications. In addition, modal analysis is
carried out by using Ansys to identify the natural frequency of
the best diaphragm geometry. Also Piezoresistive sensing
elements are designed and simulated by performing coupled
field analysis using COMSOL Multiphysics. Simulation results
reveal that piezo resistive square type pressure sensors have
high sensitivity in a wide range of pressures.
