Abstract:
It is essential for the Micro Electro Mechanical
Systems (MEMS) research industry to introduce novel concepts of
micro motors to overcome problems in existing micro motors. This
paper propose a novel concept of a micro motor using kink
actuators and reciprocating rack and pinion assembly. Design
details of the reciprocating rack and pinion is discussed in the
paper. A detailed analysis of structural, transient, thermal,
electrical properties was performed using the COMSOL software
is also discussed. Finally a fabrication method is purposed using
electron beam lithography and ultraviolet lithography.
Citation:
A. H. T. E. De Silva et al., "A novel MEMS motor based on thermal actuation," 2016 Moratuwa Engineering Research Conference (MERCon), 2016, pp. 48-53, doi: 10.1109/MERCon.2016.7480114.
