A novel mems motor based on thermal actuation

De Silva, AHTE; De Silva, DDN; Perera, KDCJ; Priyashantha, AMB; Sampath, LLR; Darshan, P; Jayathilaka, WADM; Amarasinghe, YWR

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dc.contributor.author	De Silva, AHTE
dc.contributor.author	De Silva, DDN
dc.contributor.author	Perera, KDCJ
dc.contributor.author	Priyashantha, AMB
dc.contributor.author	Sampath, LLR
dc.contributor.author	Darshan, P
dc.contributor.author	Jayathilaka, WADM
dc.contributor.author	Amarasinghe, YWR
dc.contributor.editor	Jayasekara, AGBP
dc.contributor.editor	Bandara, HMND
dc.contributor.editor	Amarasinghe, YWR
dc.date.accessioned	2022-09-08T09:03:20Z
dc.date.available	2022-09-08T09:03:20Z
dc.date.issued	2016-04
dc.identifier.citation	A. H. T. E. De Silva et al., "A novel MEMS motor based on thermal actuation," 2016 Moratuwa Engineering Research Conference (MERCon), 2016, pp. 48-53, doi: 10.1109/MERCon.2016.7480114.	en_US
dc.identifier.uri	http://dl.lib.uom.lk/handle/123/18989
dc.description.abstract	It is essential for the Micro Electro Mechanical Systems (MEMS) research industry to introduce novel concepts of micro motors to overcome problems in existing micro motors. This paper propose a novel concept of a micro motor using kink actuators and reciprocating rack and pinion assembly. Design details of the reciprocating rack and pinion is discussed in the paper. A detailed analysis of structural, transient, thermal, electrical properties was performed using the COMSOL software is also discussed. Finally a fabrication method is purposed using electron beam lithography and ultraviolet lithography.	en_US
dc.language.iso	en	en_US
dc.publisher	IEEE	en_US
dc.relation.uri	https://ieeexplore.ieee.org/document/7480114	en_US
dc.subject	MEMS	en_US
dc.subject	Micro motor	en_US
dc.subject	Kink actuator	en_US
dc.subject	Reciprocating rack and pinion	en_US
dc.title	A novel mems motor based on thermal actuation	en_US
dc.type	Conference-Full-text	en_US
dc.identifier.faculty	Engineering	en_US
dc.identifier.department	Engineering Research Unit, University of Moratuwa	en_US
dc.identifier.year	2016	en_US
dc.identifier.conference	2016 Moratuwa Engineering Research Conference (MERCon)	en_US
dc.identifier.place	Moratuwa, Sri Lanka	en_US
dc.identifier.pgnos	pp. 48-53	en_US
dc.identifier.proceeding	Proceedings of 2016 Moratuwa Engineering Research Conference (MERCon)	en_US
dc.identifier.email	ahteranga@gmail.com	en_US
dc.identifier.email	dashankadesilva@gmail.com	en_US
dc.identifier.email	chamikajp@gmail.com	en_US
dc.identifier.email	bpriyashantha@live.com	en_US
dc.identifier.email	sruwan25@gmail.com	en_US
dc.identifier.email	darsan1991@gmail.com	en_US
dc.identifier.email	dumithjayathilaka@gmail.com	en_US
dc.identifier.email	ranama@mech.mrt.ac.lk	en_US
dc.identifier.doi	10.1109/MERCon.2016.7480114	en_US