Abstract:
Micro electro mechanical systems (MEMS) based
micro gripper for micro-assembling processes is designed.
Gripper arms are actuated using a combination of Ni-Ti shape
memory alloys and Si springs allowing a gripping range of 1-
120μm. Heat which is needed to actuate shape memory alloy
(SMA) is obtained by electro thermal properties of Ni-Ti by
passing a current which is controlled by specially designed
microprocessor controlled circuit design. Stability of the gripper
design is validated using a commercially available finite element
analysis (FEA) tool COMSOL Multiphysics simulations for
stresses in gripper arms and for Eigen frequencies. Proposed
fabrication process uses minimum number of masks and it makes
the design much suits for batch production.
Citation:
K. C. Munasinghe et al., "New MEMS based micro gripper using SMA for micro level object manipulation and assembling," 2016 Moratuwa Engineering Research Conference (MERCon), 2016, pp. 36-41, doi: 10.1109/MERCon.2016.7480112.