Abstract:
In this paper, a triangular shaped piezoelectric vibration energy harvester (TS-PVEH) with zinc oxide (ZnO) thin
films as the piezoelectric layer is reported. The effect of post-annealing temperature on the microstructure and
piezoelectric performance of ZnO thin film deposited by magnetron sputtering method is investigated firstly. The
results show that the optimum post-annealing temperature of 150 °C was the most beneficial to improve the
piezoelectric properties of ZnO thin films. Four prototypes of TS-PVEH with different structure parameters are
fabricated and optimized. The simulation and experiment results indicate that the height and width of the
triangular structure have a significant influence on the vibration mode and the output performance of TS-PVEHs.
The optimization results indicate that the third prototype has the best output performance. Its open-circuit
voltage and short-circuit current are 290 mV and 1.25 μA, respectively, when the vibration acceleration is 5 m/s2
and the frequency is 56 Hz. Moreover, it has the highest load power density of 0.035 μW/cm2 when the load is
0.1MΩ.
Citation:
Zhang, X., Wang, P., Liu, X., Zhang, W., Zhong, Y., Zhao, H., Shi, S., Jin, S., & Amarasinghe, Y. W. R. (2019). Effect of post-annealing on microstructure and piezoelectric properties of ZnO thin film for triangular shaped vibration energy harvester. Surface and Coatings Technology, 361, 123–129. https://doi.org/10.1016/j.surfcoat.2019.01.036
