Design and simulation of a monolithic MEMS platform for single-cell injection with integrated gripping and force feedback

Abstract

This paper presents the design and simulation of a MEMS-based single-cell injection platform that integrates an electrostatic comb-drive actuator, dual-arm microgripper and embedded piezoresistive force sensing. The system enables precise membrane penetration and controlled cell immobilization through lateral actuation and real-time force feedback. COMSOL Multiphysics simulations validate the stroke of the injector exceeding 5 𝜇m and force generation within the biologically safe range of 10–20 𝜇N. Gripper simulations confirm symmetric and stable motion suitable for delicate cell handling. Modal analysis reveals natural frequencies above 3 kHz, ensuring stability under typical lab environmental vibrations. Along with a proper material selection a five-mask, double-sided bulk micromachining process is proposed for fabrication. The integrated system offers a compact, reliable solution for automated, high-precision single-cell manipulation in biomedical applications.