Design and simulation of a 4-dof vibratory gyroscope

Abstract

In this paper, design and simulation of a Multi DoF (Degree of Freedom) Vibratory Gyroscope is presented. Most of the available gyroscopes are vibratory gyroscopes due to their design and fabrication simplicity. But the performance of these devices is highly sensitive to device operating conditions, fabrication imperfections, and environmental effects. As a solution to this, Multi DoF vibratory gyroscopes have been introduced. The Multi DoF system proposed here consists of 2 DoF drive and sense mode vibrations. During the design procedure of the system, structural parameters are optimized to obtain a constant amplitude flat operational frequency region with a wider bandwidth. In addition to that Dynamic Amplification increases the sensitivity. Drive mode forced vibration is actuated electrostatically and suspension structure was chosen to minimize the quadrature error. The device uses capacitive sensing to measure angular velocity. Further, SOI(Silicon on Insulator) based fabrication process is proposed to fabricate the 4 DoF vibratory gyroscope.