Review on MEMS based micropumps for biomedical applications

Abstract

In this 21st century biomedical industry is gaining popularity in manufacturing biomedical devices due to their growing market and great demand. In this paper, the development of MEMS based micropumps for biomedical applications has been addressed. The objective of this paper is to present the major features and issues such as applications, working principles, actuation techniques, design specifications and parameters etc… associated with micropumps. Based on the actuation principles, micropumps are classified into two main kinds such as mechanical and non-mechanical micropumps. The presented literature review on micropumps will provide widespread evidence for researchers working on design and development of micropumps for biomedical applications.